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Products of DNF
Selected Element
| 1Hhydrogen1.0079 | 2Hehelium4.0026 | ||||||||||||||||
| 3Lilithium6.941 | 4Beberyllium9.0122 | 5Bboron10.811 | 6Ccarbon12.011 | 7Nnitrogen14.007 | 8Ooxygen15.999 | 9Ffluorine18.998 | 10Neneon20.1797 | ||||||||||
| 11Nasodium22.989 | 12Mgmagnesium24.305 | 13Alaluminium26.981 | 14Sisilicon28.085 | 15Pphosphorus30.973 | 16Ssulfur32.06 | 17Clchlorine35.45 | 18Arargon39.948 | ||||||||||
| 19Kpotassium39.0983 | 20Cacalcium40.078 | 21Scscandium44.955 | 22Tititanium47.867 | 23Vvanadium50.9415 | 24Crchromium51.9961 | 25Mnmanganese54.938 | 26Feiron55.845 | 27Cocobalt58.933 | 28Ninickel58.6934 | 29Cucopper63.546 | 30Znzinc65.38 | 31Gagallium69.723 | 32Gegermanium72.63 | 33Asarsenic74.921 | 34Seselenium78.971 | 35Brbromine79.904 | 36Krkrypton83.798 |
| 37Rbrubidium85.4678 | 38Srstrontium87.62 | 39Yyttrium88.90584 | 40Zrzirconium91.224 | 41Nbniobium92.90637 | 42Momolybdenum95.95 | 43Tctechnetium[98] | 44Ruruthenium101.07 | 45Rhrhodium102.90 | 46Pdpalladium106.42 | 47Agsilver107.8682 | 48Cdcadmium112.414 | 49Inindium114.818 | 50Sntin118.710 | 51Sbantimony121.760 | 52Tetellurium127.60 | 53Iiodine126.90 | 54Xexenon131.293 |
| 55Cscaesium132.90 | 56Babarium137.327 | 57-71 lanthanoids | 72Hfhafnium178.49 | 73TaTantalum180.94 | 74Wtungsten183.84 | 75ReRhenium186.207 | 76OsOsmium190.23 | 77IrIridium192.217 | 78PtPlatium195.084 | 79AuGold196.96 | 80HgMercury200.59 | 81TlThallium204.38 | 82PbLead207.2 | 83BiBismuth208.98 | 84PoPolonium[209] | 85AtAstatine[210] | 86RnRadon[222] |
| 87FrFrancium[223] | 88RaRadium[226] | 89-103 actinoids | 104RfRutherfordium[267] | 105DbDubnium[268] | 106SgSeaborgium[271] | 107BhBohrium[272] | 108HsHassium[270] | 109MtMeitnerium[276] | 110DsDarmstadtium[281] | 111RgRoentgenium[280] | 112CnCopernicium[285] | 113NhNihonium[284] | 114FlFlerovium[289] | 115McMoscovium[288] | 116LvLivermorium[293] | 117TsTennessine[294] | 118OgOganesson[294] |
| 57Lalanthanum138.90 | 58Cecerium140.116 | 59Prpraseodymium140.90 | 60Ndneodymium114.242 | 61Pmpromethium[145] | 62Smsamarium150.36 | 63Eueuropium151.964 | 64Gdgadolinium157.25 | 65Tbterbium158.92 | 66Dydysprosium162.500 | 67Hoholmium164.93 | 68Ererbium167.259 | 69Tmthulium168.93 | 70Ybytterbium173.054 | 71Lulutetium174.9668 | |||
| 89Acactinium[227] | 90Ththorium232.0377 | 91Paprotactinium231.03 | 92Uuranium238.02 | 93Npneptunium[237] | 94Puplutonium[244] | 95Amamericium[243] | 96Cmcurium[247] | 97Bkberkelium[247] | 98Cfcalifornium[251] | 99Eseinsteinium[252] | 100Fmfermium[257] | 101Mdmendelevium[258] | 102Nonobelium[259] | 103Lrlawrencium[262] |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| Co | 27 | (Cp)Co(CO)2 | (cyclopentadienyl)(dicarbonyl)cobalt | Metallzation Metal |
| CCTBA | (Hexacarbonyl)(t-butylacetylene)dicobalt | Metallzation Metal |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| Hf | 72 | (HMDS)Hf(Py)3 | (Hexamethyldisilazane)Tris(pyrrolidine)Hafnium | High-k for Metal Gate |
| HTTB | Hafnium(IV) tert-butoxide | High-k for Metal Gate | ||
| TEMAHf | Tetrakis(ethylmethylamido)Hafnium | High-k for Capacitor | ||
| TEMAHf | Tetrakis(ethylmethylamido)Hafnium | High-k for Metal Gate |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| C | 6 | 1-Hexene | 1-Hexene | Etch Hard Mask Film |
| Propylene | Propylene | Etch Hard Mask Film |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| Si | 14 | 4MS | Tetramethylsilane | Etch Hard Mask Film |
| 4MS | Tetramethylsilane | Barrier Metal | ||
| BTBAS | Bis(tert-butylamino)silane | SiO2 / SiN | ||
| CSN-2 | 1,3-Diisopropyl-2,4-dimethylcylcodisilazane | SiO2 / SiN | ||
| CSN-2 | 1,3-Diisopropyl-2,4-dimethylcylcodisilazane | Encapsulation & Passivation | ||
| D2S2 | Bis(ethylmethylamino)silane | Gap Fill Material | ||
| DIPAS | Diisopropylaminosilane | DPT Material | ||
| DIPAS | Diisopropylaminosilane | SiO2 / SiN | ||
| DIPAS | Diisopropylaminosilane | Encapsulation & Passivation | ||
| DMDMOS | Dimethyldimethoxysilane | Low-k | ||
| DTDH-3H2 | Bis(dimethylsilyl)silylamine | SiO2 / SiN | ||
| DTDH-3H2 | Bis(dimethylsilyl)silylamine | Encapsulation & Passivation | ||
| DTDN-1H2 | Bis(dimethylsilyl)(dimethylaminodimethylsilyl)amine | SiO2 / SiN | ||
| DTDN-1H5 | Bis(methylsilyl)(dimethylaminomethylsilyl)amine | SiO2 / SiN | ||
| DTDN-1H5 | Bis(methylsilyl)(dimethylaminomethylsilyl)amine | Encapsulation & Passivation | ||
| DTDN-2H2 | Bis(dimethylaminomethylsilyl)trimethylsilylamine | SiO2 / SiN | ||
| DTDN-2H2 | Bis(dimethylaminomethylsilyl)trimethylsilylamine | Encapsulation & Passivation | ||
| DTDN-2H4 | Bis(dimethylaminomethylsilyl)methylsilylamine | SiO2 / SiN | ||
| DTDN-2H4 | Bis(dimethylaminomethylsilyl)methylsilylamine | Encapsulation & Passivation | ||
| DTDN-3H3 | Tris(dimethylaminomethylsilyl)amine | SiO2 / SiN | ||
| E2S2 | Bis(Diethylamino)silane | DPT Material | ||
| HCDS | Hexachlorodisilane | SiO2 / SiN | ||
| NSi-01 | Bis(dimethylaminomethylsilyl)amine | SiO2 / SiN | ||
| NSi-01 | Bis(dimethylamino)(methylsilyl)amine | Encapsulation & Passivation | ||
| OMCTS | Octamethylcyclosiloxane | Low-k | ||
| PS | Polysilazane | Gap Fill Material | ||
| TIPAS | Tris(isopropylmino)silane | Gap Fill Material | ||
| TMCTS | 1,3,5,7-Tetramethylcyclosiloxane | Low-k | ||
| Tri-DMAS | Tris(dimethylamino)Silane | Gap Fill Material | ||
| Tri-DMAS | Tris(dimethylamino)Silane | SiO2 / SiN |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| Zr | 40 | A2HP7 | Tris(dimethylamido)Zirconium cyclopentadienide | High-k for Capacitor |
| A2HP7 | Tris(dimethylamido)Zirconium cyclopentadienide | High-k for Metal Gate | ||
| Cp(Me)CpZr(OEt)2 | (cyclopentadienyl)(methylcyclopentadienyl) Zirconium Bis(ethoxide) | High-k for Capacitor | ||
| TEMAZr | Tetrakis(ethylmethylamido)Zirconium | High-k for Capacitor | ||
| TEMAZr | Tetrakis(ethylmethylamido)Zirconium | High-k for Metal Gate |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| Al | 13 | Alpis-3 | Aluminum borohydride trimethylamine | Metallzation Metal |
| DMAH | Dimethylalane | Metallzation Metal | ||
| DMEAA | Dimethylethylamine:alane | Metallzation Metal | ||
| TMA | Trimethylaluminium | High-k for Capacitor | ||
| TMA | Trimethylaluminium | Metallzation Metal | ||
| TMA | Trimethylaluminium | Encapsulation & Passivation |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| Ge | 32 | BDMEDAGe | Bis(dimethylethylenediamine)Germanium | GST Material |
| TDMAGe | Tetrakis(dimethylamido)Germanium | GST Material | ||
| TEMAGe | Tetrakis(ethylmethylamido)Germanium | GST Material |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| W | 74 | BTBBDMT (= TBDMW) | Bis(t-butylimido)bis(dimethylamido)Tungsten | Metallzation Metal |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| Sn | 50 | DTP-01 | Bis(dimethylamino)dimethyltin | Encapsulation & Passivation |
| DTP-02 | Dimethylaminotrimethyltin | Encapsulation & Passivation |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| Ni | 28 | MABONi [= Ni(dmamb)2] | (1-dimethylamino-2-methyl-2-butoxide)Nickel(II) | Metallzation Metal |
| Ni(EtCp)2 | Bis(ethylcyclopentadienyl) Nickel | Metallzation Metal |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| Ru | 44 | Ru(EtCp)2 | Bis(ethylcyclopentadienyl)Ruthenium | Barrier Metal |
| Ru(EtCp)2 | Bis(ethylcyclopentadienyl)Ruthenium | Electrode Material | ||
| Ru-4 | Ru(η6-p-Cymene)(η4-1,3-cyclohexadiene) | Barrier Metal | ||
| Ru-4 | Ru(η6-p-Cymene)(η4-1,3-cyclohexadiene) | Electrode Material |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| Nb | 41 | TBTDEN | Tris(diethylamido)(tert-butylimido)niobium(V) | High-k for Capacitor |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| Ta | 73 | TBTDETa | (t-butylimido)tris(diethylamido)Tantalum | Barrier Metal |
| TBTDETa | (t-butylimido)tris(diethylamido)Tantalum | High-k for Metal Gate | ||
| TBTDETa | (t-butylimido)tris(diethylamido)Tantalum | Electrode Material | ||
| TBTEMTa | (t-butylimido)tris(ethylmethylamido)Tantalum | Barrier Metal | ||
| TBTEMTa | (t-butylimido)tris(ethylmethylamido)Tantalum | Electrode Material |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| Sb | 51 | TDMASb | Tetrakis(dimethylamido)Antimony | GST Material |
| 원소 | 원소번호 | 제품명 | 화학명 | 용도 |
|---|---|---|---|---|
| Ti | 22 | TDMAT | Tetrakis(dimethylamido)titanium(IV) | Barrier Metal |
| TDMAT | Tetrakis(dimethylamido)titanium(IV) | Electrode Material | ||
| TiCl4 | Titanium tetrachloride | Barrier Metal | ||
| TiCl4 | Titanium tetrachloride | Electrode Material |