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원소별 제품 LIST

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원소 제품명 용도
Al Alpis-3 Metallization Metal
TMA High-k for Capacitor
Metallization Metal
DMEAA Metallization Metal
DMAH Metallization Metal
Ru Ru(EtCp)2 Barrier Metal
Electrode Material
Ru-4 Barrier Metal
Electrode Material
Ti TDMAT Barrier Metal
Electrode Material
TiCl4 Barrier Metal
Electrode Material
Si DIPAS DPT Material
Low Temp. SiO2 / SiN
E2S2 DPT Material
PS Gap Fill Material
D2S2 Gap Fill Material
TDMAS(Tri-DMAS) Gap Fill Material
Low Temp. SiO2 / SiN
TIPAS Gap Fill Material
Low Temp. SiO2 / SiN
TEMS Gap Fill Material
Low Temp. SiO2 / SiN
DTDH-2 Low Temp. SiO2 / SiN
DTDH-3 Low Temp. SiO2 / SiN
DTDN-2 Low Temp. SiO2 / SiN
DTDN-3 Low Temp. SiO2 / SiN
DTDN-2H2 Low Temp. SiO2 / SiN
DTDN-3H3 Low Temp. SiO2 / SiN
DTDH-3H2 Low Temp. SiO2 / SiN
CSN-2 Low Temp. SiO2 / SiN
DMTMDSO Low-k
DMDMOS Low-k
OMCTS Low-k
TPOSL Low-k
TMTCS Low-k
4MS Etch Hard Mask Film
3MS Etch Hard Mask Film
C 1-Hexene Etch Hard Mask Film
Propylene Etch Hard Mask Film
DSH SOC Material
Cu MABOC Metallization Metal
Ge TDMAGe GST Material
TEMAGe GST Material
BDMEDAGe GST Material
Zr TEMAZr High-k for Capacitor
High-k for Metal Gate
A2HP7 High-k for Capacitor
High-k for Metal Gate
Cp(Me)CpZr(OEt)2 High-k for Capacitor
Nb TBTDEN High-k for Capacitor
Sb TDMASb GST Material
Ta TBTDETa Barrier Metal
Electrode Material
High-k for Metal Gate
TBTEMTa Barrier Metal
Electrode Material
Te DIPTe GST Material
DTBUTe GST Material
Hf TEMAHf High-k for Capacitor
High-k for Metal Gate
Co CCTBA Metallization Metal
CpCo(CO)2 Metallization Metal
Ni MABONi Metallization Metal
Ni(EtCp)2 Metallization Metal
Se SS2 GST Material
W BTBBDMT Metallization Metal