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Electrode Material

Electrode Material은 메모리소자에서 전자를 보관하는 Capacitor의 전극물질로써 Contact 저항이 낮으면서 구조적으로 튼튼한 물질이
요구됩니다. 최근까지는 TiN이 Bottom Electrode로 사용되고 있으나 선폭의 미세화로 Ru 및 Nb 물질이 연구 되고있습니다.

Electrode Material

Product Structure Property MSDS
Ru(EtCp)2 Molecular Formula
Molecular Weight
Melting Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C14H18Ru
: 287.37g/mol
: 6℃
: 90℃/0.34torr

: Liquid (Yellow)
: React slowly
Ru-4 Molecular Formula
Molecular Weight
Melting Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C16H22Ru
: 315.23g/mol
: -
: 134℃/1.0torr
: Liquid (Yellow)
: React slowly
TDMATi Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C8H24N4Ti
: 224.18g/mol
: 225℃
: 25℃/0.1torr
: Liquid (Pale yellow)
: React Violently
TiCl4 Molecular Formula
Molecular Weight
Boiling Point
Melting Point
Vapor Pressure
Physical State/Color
Water Reactivity
: TiCl4
: 189.69g/mol
: 136.4℃
: -24.1℃
: 20℃/9.75torr
: Liquid (Colorless)

: React Violently
TBTDETa Molecular Formula
Molecular Weight
Melting Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C16H39N4Ta
: 468.46g/mol
: 95℃/0.5torr
: 120℃/1.0torr
: Liquid(Pale yellow)
: React Violently
TBTEMTa Molecular Formula
Molecular Weight
Melting Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C13H33N4Ta
: 426.38g/mol
: 95℃/1.8torr
: N/A
: Liquid(Pale yellow)
: React Violently