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Low Temp. SiO2/SiN

Nand Flash memory의 제조 방법이 20nm 이하부터 Floating Gate에서 Charge Trap으로 변경되고 있으며, 1x 이하 Nand Flash memory 제조를 위해서는 CT-3D 구조 도입이 요구되고 있습니다. 이 3차원 적층 구조는 Hole의 Aspect Ratio가 매우 크기때문에 ALD 장비를 활용한 정밀한 두께 컨트롤이 필요합니다. 이에 고품질 Blocking Oxide 또는 Tunneling Oxide(Gate Oxide) 재료로 ALD용 SiO2 및 SiN이 사용되어야 합니다.

Low Temp. SiO2/SiN

Product Structure Property MSDS
DIPAS Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C6H17NSi
: 131.30g/mol
: 117℃
: 55℃/106torr
: Colorless liquid
: Violently react
TEMS Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C9H25N3Si
: 203.40g/mol
: 170~171℃
: 20℃/1.2torr
: Colorless liquid
: Violently react
TIPAS Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C9H25N3Si
: 203.40g/mol
: 165℃
: 25℃/2.51torr
: Colorless liquid
: Violently react
TDMAS(Tri-DMAS) Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C6H19N3Si
: 161.3g/mol
: 145℃
: 25℃/7torr
: Colorless liquid
: Slowly react
DTDH-2 Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C7H23NSi3
: 205.52g/mol
: 166℃
: 25℃/2.14torr
: Colorless liquid
: Violently react
DTDH-3 Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C6H21NSi3
: 191.49g/mol
: 152℃
: 25℃/3.17torr
: Colorless liquid
: Slowly react
DTDN-2 Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C15H41N3Si3
: 347.77g/mol
: 277℃
: 90℃/0.19torr
: Colorless liquid
: Slowly react
DTDN-3 Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C18H48N4Si3
: 404.87g/mol
: 313℃
: 90℃/0.04torr
: Colorless liquid
: Slowly react
DTDN-2H2 Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C9H29N3Si3
: 263.61g/mol
: 237℃
: 60℃/1.04torr
: Colorless liquid
: Slowly react
DTDN-3H3 Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C9H30N4Si3
: 278.62g/mol
: 250℃
: 75℃/1.07torr
: Colorless liquid
: Slowly react
DTDH-3H2 Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C4H17NSi3
: 163.44g/mol
: 125℃
: 20℃/4.07torr
: Colorless liquid
: Violently react
CSN-2 Molecular Formula
Molecular Weight
Boiling Point
Vapor Pressure
Physical State/Color
Water Reactivity
: C8H22N2Si2
: 202.44g/mol
: 173-175℃
: 30℃/1.58torr
: Colorless liquid
: Violently react