Barrier Metal DPT Material Electrode Material Etch Hard Mask Filem GST Material Gap Fill Material High-k for Capacitor High-k for Metal Gate Low-k Metallization Metal SiO2 / SiN DRAM cell capacitor requires electrode materials having low electrical resistivity as well as good etching property. Ru and Nb have been being studied as bottom electrode while TiN has been used. PRODUCT Ru(EtCp)2 Bis(ethylcyclopentadienyl)Ruthenium 자세히보기 Ru-4 Ru(η6-p-Cymene)(η4-1,3-cyclohexadiene) 자세히보기 TBTDETa (t-butylimido)tris(diethylamido)Tantalum 자세히보기 TBTEMTa (t-butylimido)tris(ethylmethylamido)Tantalum 자세히보기 TDMAT Tetrakis(dimethylamido)titanium(IV) 자세히보기 TiCl4 Titanium tetrachloride 자세히보기 Ru(EtCp)2 Chemical name, Chemical formula, formula weight (g/mol), Boiling point (℃), Vapor pressure (℃/torr), Phase, Water reactivity Chemical name. Bis(ethylcyclopentadienyl)Ruthenium Chemical formula C14H18Ru formula weight (g/mol) 287.37 Boiling point (℃) - Vapor pressure (℃/torr) 90 / 0.34 Phase Liquid (Yellow) Water reactivity React slowly 닫기 Ru-4 Chemical name, Chemical formula, formula weight (g/mol), Boiling point (℃), Vapor pressure (℃/torr), Phase, Water reactivity Chemical name. Ru(η6-p-Cymene)(η4-1,3-cyclohexadiene) Chemical formula C16H22Ru formula weight (g/mol) 315.23 Boiling point (℃) 290 Vapor pressure (℃/torr) 134 / 1.0 Phase Yellow Liquid Water reactivity React slowly 닫기 TBTDETa Chemical name, Chemical formula, formula weight (g/mol), Boiling point (℃), Vapor pressure (℃/torr), Phase, Water reactivity Chemical name. (t-butylimido)tris(diethylamido)Tantalum Chemical formula C16H39N4Ta formula weight (g/mol) 468.46 Boiling point (℃) 95 / 0.5 Vapor pressure (℃/torr) 120 / 1.0 Phase Pale yellow liquid Water reactivity React violently 닫기 TBTEMTa Chemical name, Chemical formula, formula weight (g/mol), Boiling point (℃), Vapor pressure (℃/torr), Phase, Water reactivity Chemical name. (t-butylimido)tris(ethylmethylamido)Tantalum Chemical formula C13H33N4Ta formula weight (g/mol) 426.38 Boiling point (℃) 88 / 0.1 Vapor pressure (℃/torr) 95 / 1.8 Phase Pale yellow liquid Water reactivity React violently 닫기 TDMAT Chemical name, Chemical formula, formula weight (g/mol), Boiling point (℃), Vapor pressure (℃/torr), Phase, Water reactivity Chemical name. Tetrakis(dimethylamido)titanium(IV) Chemical formula C8H24N4Ti formula weight (g/mol) 224.18 Boiling point (℃) 225 Vapor pressure (℃/torr) 25 / 0.1 Phase Pale yellow liquid Water reactivity React violently 닫기 TiCl4 Chemical name, Chemical formula, formula weight (g/mol), Boiling point (℃), Vapor pressure (℃/torr), Phase, Water reactivity Chemical name. Titanium tetrachloride Chemical formula TiCl4 formula weight (g/mol) 189.69 Boiling point (℃) 136.4 Vapor pressure (℃/torr) 20 / 9.75 Phase Colorless liquid Water reactivity React violently 닫기
